The S neox Cleanroom represents a previously unheard-of technological turning point for optical metrology. It offers the most versatility within manufacturing settings.
With its four different light sources and four-in-one technology, the S neox Cleanroom offers unmatched adaptability for shifting application requirements.
Image CreditSensofar Metrology
It has been meticulously designed to be ISO Class 1 and ESD compatible.
Image Credit: Sensofar Metrology
Piezoelectric Z motor integration is an option for the S neox Cleanroom, improving performance. It also covers thicknesses between 50 nm and 5 mm.
Image Credit: Sensofar Metrology
Focus on the sample’s surface and the integrable head will automatically determine the best acquisition setting for any measurement with this equipment when using the 3D Auto mode.
Image Credit: Sensofar Metrology
客观镜头
表格1。Source: Sensofar Metrology
|
Brightfield |
Interferometry |
| MAG |
5X |
10X |
20倍 |
50X |
100X |
150X |
2.5倍 |
5X |
10X |
20倍 |
50X |
100X |
| NA |
0.15 |
0.30 |
0.45 |
0.80 |
0.90 |
0.95 |
0.075 |
0.13 |
0.30 |
0.40 |
0.55 |
0.70 |
| WD (mm) |
23.5 |
17.5 |
4.5 |
1.0 |
1.0 |
0.2 |
10.3 |
9.3 |
7.4 |
4.7 |
3.4 |
2.0 |
| FOV1(μm) |
3378x
2826 |
1689x
1413 |
845x
707 |
338x
283 |
169x
141 |
113x
94 |
6756x
5652 |
3378x
2826 |
1689x
1413 |
845x
707 |
338x
283 |
169x
141 |
| Spatial sampling2(μm) |
1.38 |
0.69 |
0.34 |
0.13 |
0.07 |
0.05 |
2.76 |
1.38 |
0.69 |
0.34 |
0.13 |
0.07 |
| Optical resolution3(μm) |
0.94 |
0.47 |
0.31 |
0.18 |
0.16 |
0.148 |
1.87 |
1.08 |
0.47 |
0.35 |
0.26 |
0.20 |
| Measurement noise4(nm) |
100 |
30 |
8 |
5 |
3 |
1 |
PSI/ePSI 0.1 nm (0.01 nm with PZT) CSI 1 nm |
| Maximum slope5(º) |
9 |
17 |
27 |
44 |
64 |
72 |
4 |
7 |
17 |
24 |
33 |
44 |
System Specifications
Table 2.Source: Sensofar Metrology
| . |
. |
| 测量原理 |
Confocal, PSI, ePSI, CSI, Ai Focus Variation and Thin Film |
| Measurement types |
Image, 3D, 3D thickness, profile and coordinates |
| Camera |
5 Mpx: 2448x2048 pixels (60 fps) |
| 共聚焦帧速率 |
60 fps (5 Mpx); 180 fps (1.2 Mpx) |
| Vertical scan range coarse |
Linear stage: 40 mm range; 5 nm resolution |
| Vertical scan range fine |
Piezoelectric scanner with capacitive sensor: 200 μm range; 1.25 nm resolution |
| Max. Z measuring range |
PSI 20 μm, ePSI 10 mm, CSI 10 mm; Confocal & Ai Focus Variation 34 mm |
| LED light sources |
红色（630 nm）;绿色（530 nm）;蓝色（460 nm）和白色（575 nm;中心） |
| Nosepiece |
6 positions fully motorized |
| Sample reflectivity |
0.05% to 100% |
| 高级软件分析 |
Inc: SensoVIEW; Op: SensoPRO, SensoMAP |
| Communication protocol |
dll;XML（可选） |
| Computer |
最新的英特尔处理器 |
| 操作系统 |
Microsoft Windows 10®, 64 bit |
| Cable Length |
3 m (5 m, 10 m optional) |
| 环境 |
Temperature 10 ºC to 35 ºC; Humidity <80% RH; Altitude <2000 m |
S neox Cleanroom sensor, the highest flexibility compatible with Cleanroom - Ads
Dimensions
Image Credit: Sensofar Metrology
1Maximum field of view with 3/2” camera and 0.5X optics.
2Pixel size on the surface.
3L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Spatial sampling could limit the optical resolution for interferometric objectives. Values for blue LED.
4Measurement noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. For interferometry objectives, PSI, 10 phase averages. The 0.01 nm are achieved with Piezo stage scanner and temperature-controlled room. Values for green LED (white LED for CSI). Values obtained in a VC-E vibration environment.
5On smooth surfaces. Up to 86° on rough surfaces.
6This is the weight of the sensor head with one objective in the turret.