今天Carl Zeissannounces a series of launches covering a range of product and application innovations. The start of this series is marked by the next-generation analytical field emission scanning electron microscope - the MERLIN™. This instrument combines the up to now contradictory requirements of ultra-high resolution imaging and analytical capabilities. "Customers have a need for more than just high resolution images of their samples", Dr. Dirk Stenkamp, Member of the Board at Carl Zeiss SMT explains. "With unique analytical capabilities our instruments provide maximum information with maximum insight".
来自Carl Zeiss的新Fe-Sem Merlin™的关键方面很容易使用，例如在不到一分钟内的原地样品清洁，独特的充电补偿或图像获取。
MERLIN™ - 一个分析和高分辨率
The MERLIN FE-SEM overcomes the conflict between image resolution and analytical capability. The core of MERLIN is the enhanced GEMINI II column which, with its double condenser system, achieves an image resolution of 0.8 nanometers. A sample current of up to 300 nanoamperes is available for analytical purposes such as energy and wavelength dispersive X-ray spectroscopy (EDS and WDS), diffraction analysis of backscattered electrons (EBSD) or the generation of cathodoluminescence.
该系统为用户提供多种详细解决方案，用于过去无法充分执行的任务。卡尔·蔡司（Carl Zeiss）“完全检测系统”为这项成就的基础奠定了基础。它由用于表面成像的镜头内SE检测器，材料对比度的镜头内ESB检测器和广泛分散的反向散射电子的ASB检测器组成。后者包含有关样品晶体方向的特定信息。
Merlin的独特电荷补偿系统还允许对非传导样品进行高分辨率成像。积聚在样品表面的电子被氮的细射流扫除。这样，可以使用Merlin的完整检测系统。收费补偿系统的另一个功能是纯氧气启用原位样品清洁的通道。在真空室内，经常出现的碳沉积物从样品表面取出，从而产生了明显的酥脆和对比图像。这两种选项都允许用户专注于样本的成像和分析，而不是在样本准备中投入时间和金钱。
MERLIN’s new electronic system permits a flexible instrument configuration. Additional detectors can be retrofitted quickly, allowing the user to adapt the system to growing requirements. In addition, this flexibility makes the investment more future-proof and enables the user to benefit over the long term from ongoing detector development.
Stenkamp指出：“新的Merlin以及最近推出的Auriga Crossbeam工作站完美地体现了我们的产品的代表：最大信息 - 最大见解”。“而且 - 在未来几周内，市场可能会期望更多，直到8月底在奥地利格拉兹举行的M＆M Show和欧洲显微镜会议。”