Carl Zeiss Orion Plus氦离子显微镜允许高级纳米制作研究

Scientists are currently investigating new uses for Helium Ion microscopy in nano-patterning.

Since it is not limited by the proximity effect of conventional e-beam lithography, Helium Ion technology seems to be an up-and-coming alternative, especially when it comes to printing ever finer features. For over two years, the ORION® Plus Helium Ion Microscope from Carl Zeiss has been known for its excellence in imaging uncoated insulating samples and soft materials with sub-nanometer resolution (resolution specification <0.35nm). Now—with a growing installed base of ORION instruments—academic and industrial R&D microscopists are extending the diversity of applications to include nano-fabrication.

研究人员在14 nm的球场上对5 nm的点进行了图案,而其他团队则在HSQ抗性中表现出了很好的L-bar系列。这种新的模式保真度是由显微镜的较大景深和离子的短距离启动的次级电子中的典型抗材料启动的短范围来实现的。欧洲杯足球竞彩在没有常规的狭窄过程窗口约束的情况下,可以轻松地获得HSQ中的氦离子定义模式,通常与常规光学和电子束光刻相关。

据新的猎户座客户魏·吴(Wei Wu)说,在加利福尼亚州帕洛阿尔托(Palo Alto)的惠普实验室(HP Labs)的Stan William信息和量子系统实验室的高级研究科学家说:“我们期待着进一步发展有关最小纳米最小纳米制造和成像的研究- 电子和纳米光子特征。我们将Orion仪器视为一种独特,强大的工具,它将使我们能够继续开创纪录的研究。”

Source:http://www.smt.zeiss.com/

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