The Leibniz Institute for Solid State and Materials Research Dresden, Institute for Integrative Nanosciences (IFW Dresden-IIN), Germany will shortly install multipleOxford Instruments Plasma Technology研究“芯片实验室”集成的系统。
An Oxford InstrumentsFlexALatomic layer deposition system will be used for low temperature conformal coatings of high aspect ratio multifunctional smart tubes. Two等离子体Pro100 systems with ICP 180 are being installed for the manufacture of multifunctional membranes, microfluidics and micro/nano photonic structures.
As a leader in plasma etch and deposition equipment and processes, Oxford Instruments can offer a full suite of systems to its customers, allowing the versatility to combine several plasma technologies. This purchase will enable IFW Dresden-IIN to further its innovative research.
Dr. Stefan Harazim, head of the cleanroom at the IFW Dresden-IIN said, “Our research activities at the IFW Dresden-IIN cover a wealth of modern topics in the Nanosciences ranging from flexible magnetoelectronics and wavelength-tuneable quantum light sources over ultra-sensitive lab-in-a-tube systems to compact on-chip energy storage devices and autonomous micro-/nanorobotic systems. As such we require the very best research equipment, and chose Oxford Instruments systems for their excellent capabilities, versatility and customer support.”
“The proven versatility of the Oxford InstrumentsFlexAL和等离子体Pro System100工具使它们成为IFW Dresden-Iin集成工作的“选择系统”，”牛津仪器等离子技术公司业务集团总监Michelle Bourke说。“我们的尖端设备为应用学术研究提供了2020欧洲杯下注官网合理的基础，并具有扩展生产的能力。我们为参与为许多开拓应用的材料工程提供工艺解决方案而感到自豪。”欧洲杯足球竞彩